Semiconductor BA/EP Grade Vacuum Valves - Applications of Semiconductor Vacuum Butterfly Valves

Qigo BA grade butterfly valves are clean butterfly valves driven by rotation, featuring a unique design of the sealing plate that completely isolates dust. They offer advantages such as quick opening and closing, rapid installation, compact size, and long service life.

The sealing design of pneumatic butterfly valves makes them suitable for processes requiring complete isolation of polluted and corrosive gases. BA grade butterfly valves are installed in various semiconductor fields.

Semiconductor BA/EP Grade Vacuum Valves - Design Features of Semiconductor Vacuum Butterfly Valves

? Rotating cylinder drive or manual operation for quick opening and closing

? Unique airtight design

? Sealing plate position indicator

? Flexible installation direction

? High gas conductance

? 1.5 million cycle lifespan

Body / Plate / Shaft Material

Stainless steel

Qigo primarily serves high-tech sectors such as semiconductors, flat panel displays, solar energy, optoelectronics, vacuum coating, other high-performance vacuum systems, and scientific research institutions. Over the years, it has consistently held a major share of the global market. Specializing in vacuum valves, Qigo is renowned for its strong R&D innovation and industry-leading quality. Semiconductor chip equipment and solar energy equipment manufacturers extensively use Qigo products in their machinery.

Warranty Conditions

1. One year from the date the customer receives the product, or upon reaching the set usage cycles, whichever comes first

2. Operating environment limited to air, inert gases, and vacuum

3. Damages caused by natural disasters, improper operation, and consumables are not covered under warranty